[IEEE 2014 20th International Conference on Ion Implantation Technology (IIT) - Portland, OR, USA (2014.6.26-2014.7.4)] 2014 20th International Conference on Ion Implantation Technology (IIT) - Investigation of charge build-up in NO nitrided gate oxide on 4H-SiC during Fowler-Nordheim injection and fabrication of 4H-SiC Lateral Double-Implanted MOSFETs
Moon, Jeong Hyun, Bahng, Wook, In Ho Kang,, Sang Cheol Kim,, Kim, Nam-KyunYear:
2014
Language:
english
DOI:
10.1109/IIT.2014.6940051
File:
PDF, 865 KB
english, 2014