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[IEEE 2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) - Hapuna Beach, HI, USA (2015.3.23-2015.3.26)] 2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings - Oxide-coated polysilicon disk resonator gyroscope (DRG) within the wafer-scale encapsulation process
Ahn, C.H., Ng, E., Hong, V.A., Huynh, J., Kenny, T.W., Wang, S.Year:
2015
Language:
english
DOI:
10.1109/ISISS.2015.7102392
File:
PDF, 785 KB
english, 2015