Modeling of Resistance in FinFET Local Interconnect

Modeling of Resistance in FinFET Local Interconnect

Lu, Ning, Wachnik, Richard A.
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Volume:
62
Language:
english
Journal:
IEEE Transactions on Circuits and Systems I: Regular Papers
DOI:
10.1109/TCSI.2015.2423795
Date:
August, 2015
File:
PDF, 1.78 MB
english, 2015
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