Proxy-Based Sliding-Mode Tracking Control of Piezoelectric-Actuated Nanopositioning Stages
Gu, Guo-Ying, Zhu, Li-Min, Su, Chun-Yi, Ding, Han, Fatikow, SergejVolume:
20
Language:
english
Journal:
IEEE/ASME Transactions on Mechatronics
DOI:
10.1109/TMECH.2014.2360416
Date:
August, 2015
File:
PDF, 2.50 MB
english, 2015