Strain relaxation of InGaAs by lateral oxidation of AlAs

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Strain relaxation of InGaAs by lateral oxidation of AlAs

S. K. Mathis, P. Chavarkar, A. M. Andrews, U. K. Mishra, J. S. Speck
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Year:
2000
Language:
english
DOI:
10.1116/1.1303739
File:
PDF, 1003 KB
english, 2000
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