Advances in arrayed microcolumn lithography
L. P. Muray, J. P. Spallas, C. Stebler, K. Lee, M. Mankos, Y. Hsu, M. Gmur, T. H. P. ChangYear:
2000
Language:
english
DOI:
10.1116/1.1321760
File:
PDF, 1.43 MB
english, 2000