Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2013 Vol. 31; Iss. 6
Surface-patterned micromechanical elements by polymer injection molding with hybrid molds
Schift, Helmut, Urwyler, Prabitha, Kristiansen, Per MagnusVolume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4821649
File:
PDF, 2.14 MB
english, 2013