Improved full-field rotating analyzer ellipsometry method...

Optical Engineering 2015 / 08 Vol. 54; Iss. 8

Improved full-field rotating analyzer ellipsometry method for ultrathin film characterization

Meng, Fangfang, Li, Yan, Wu, Xuejian, Chen, Kun, Wei, Haoyun, Wang, Xin
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
54
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.OE.54.8.084108
Date:
August, 2015
File:
PDF, 3.65 MB
english, 2015
Conversion to is in progress
Conversion to is failed