SPIE Proceedings [SPIE International Conference on Fiber Optics and Photonics: Selected Papers from Photonics India '96 - Madras, India (Monday 9 December 1996)] International Conference on Fiber Optics and Photonics: Selected Papers from Photonics India '96 - Precise micromaterial processing by excimer laser ablation
Uchida, Yoshiyuki, Yamada, Jun, Higa, Shuntaro, Kathuria, Yash P., Tsuboi, Akihiko, Watanabe, Sigeo, Hayashi, Niichi, Furuhashi, Hideo, Raina, J. P., Vaya, P. R.Volume:
3211
Year:
1998
DOI:
10.1117/12.345378
File:
PDF, 532 KB
1998