SPIE Proceedings [SPIE Indo-Russian Workshop on Micromechanical Systems - New Delhi, India (Tuesday 2 February 1999)] Indo-Russian Workshop on Micromechanical Systems - Silicon-micromachined accelerometers for space inertial systems
Saha, I., Islam, R., Kanakaraju, K., Jain, Yashwant K., Alex, T. K., Pustovoy, Vladimir I., Jain, Vinoy K.Volume:
3903
Year:
1999
Language:
english
DOI:
10.1117/12.369456
File:
PDF, 469 KB
english, 1999