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SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, CA (Sunday 26 August 2007)] Advances in Metrology for X-Ray and EUV Optics II - Flat-field calibration of CCD detector for long trace profiler
Kirschman, Jonathan L., Domning, Edward E., Franck, Keith D., Irick, Steven C., MacDowell, Alastair A., McKinney, Wayne R., Morrison, Gregory Y., Smith, Brian V., Warwick, Tony, Yashchuk, Valeriy V.,Volume:
6704
Year:
2007
Language:
english
DOI:
10.1117/12.732618
File:
PDF, 1.40 MB
english, 2007