Lifetime of Thin Film Heater at High Temperature

Lifetime of Thin Film Heater at High Temperature

Saito, Yukinori, Suganomata, Shinji
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Volume:
16
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.16.1867
Date:
October, 1977
File:
PDF, 130 KB
english, 1977
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