Measurements of the CF Radical in DC Pulsed CF...

Japanese Journal of Applied Physics 1990 / 5 Vol. 29; Iss. Part 2, No

Measurements of the CF Radical in DC Pulsed CF 4 /H 2 Discharge Plasma Using Infrared Diode Laser Absorption Spectroscopy

Magane, Mitsuo, Itabashi, Naoshi, Nishiwaki, Nobuki, Goto, Toshio, Yamada, Chikashi, Hirota, Eizi
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Volume:
29
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L829
Date:
May, 1990
File:
PDF, 203 KB
english, 1990
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