Downstream Gas Temperature Variation of Glow and Plasmoidal Oxygen Radio Frequency Discharges
Wickramanayaka, Sunil, Hatanaka, Yoshinori, Jimba, Hitoshi, Hosokawa, NaokichiVolume:
31
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.L738
Date:
June, 1992
File:
PDF, 204 KB
english, 1992