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Electrode Temperature Effect in Narrow-Gap Reactive Ion Etching
Tsukada, Tsutomu, Mashiro, Supika, Mashimo, KimikoVolume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.4850
Date:
October, 1993
File:
PDF, 244 KB
english, 1993