Silicon-Hydrogen ($\bf SiH_{\mbi n}$, ( n= 1, 2, 3)) Bonding Configurations in Very Thin Hydrogenated Amorphous Silicon Films Deposited on Various Kinds of Substrates under Different $\bf SiH_{4}$ Dilution Conditions
Shirai, Hajime, Drevillon, BernardVolume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L1577
Date:
November, 1994
File:
PDF, 1.25 MB
english, 1994