High-Temperature Synthesis of Amorphous Carbon Nitride Thin...

Japanese Journal of Applied Physics 1998 / 6 Vol. 37; Iss. Part 2, No

High-Temperature Synthesis of Amorphous Carbon Nitride Thin Films with Modified Microstructure

Yap, Yoke Khin, Kida, Shinjiro, Aoyama, Toshihiro, Mori, Yusuke, Sasaki, Takatomo
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Volume:
37
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.L746
Date:
June, 1998
File:
PDF, 1.04 MB
english, 1998
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