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Improved Electrical Characteristics of Al 2O 3/InP Structure by Combination of Sulfur Passivation and Forming Gas Annealing
Morikita, Shinya, Motegi, Tomoyuki, Ikoma, HideakiVolume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.L1512
Date:
December, 1999
File:
PDF, 649 KB
english, 1999