Control of Parameters Influencing the Thermal Imprint of Parylene/Silicon
Youn, Sung-Won, Goto, Hiroshi, Oyama, Shoji, Takahashi, Masaharu, Maeda, RyutaroVolume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.6363
Date:
September, 2007
File:
PDF, 734 KB
english, 2007