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Effects of Annealing on Material Characteristics of Diamond-Like Carbon Film Formed by Focused-Ion-Beam Chemical Vapor Deposition
Kanda, Kazuhiro, Igaki, Jun-ya, Saikubo, Akihiko, Kometani, Reo, Suzuki, Tsuneo, Niihara, Koichi, Saitoh, Hidetoshi, Matsui, ShinjiVolume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.7464
Date:
September, 2008
File:
PDF, 1.09 MB
english, 2008