Formation Mechanism of Oriented Pb(Zr,Ti)O 3 Thin Films on Platinum Bottom Electrodes from Amorphous Films Prepared by Liquid Delivery Metalorganic Chemical Vapor Deposition
Otani, Yohei, Fukuda, Yukio, Okamura, Soichiro, Nakamura, Kimitoshi, Nishida, Takashi, Uchiyama, Kiyoshi, Shiosaki, TadashiVolume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.09KA02
Date:
September, 2009
File:
PDF, 643 KB
english, 2009