Silicon Nitride by Using Stain Films on Silicon

Japanese Journal of Applied Physics 1967 / 3 Vol. 6; Iss. 3

Silicon Nitride by Using Stain Films on Silicon

Yamazaki, Syunpei, Kato, Yogoro, Taniguchi, Ichirou
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Volume:
6
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.6.408
Date:
March, 1967
File:
PDF, 928 KB
english, 1967
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