Utilization of the selectivity of dissolution of glassy chalcogenide semiconductor films in the formation of passive integrated-optics components
Bykovskiĭ, Yu A, Mironos, A V, Smirnov, V L, Soldatov, V IVolume:
15
Language:
english
Journal:
Soviet Journal of Quantum Electronics
DOI:
10.1070/qe1985v015n06abeh007176
Date:
June, 1985
File:
PDF, 425 KB
english, 1985