Thermal cycling response of layered gold/polysilicon MEMS...

Mechanics of Materials 2004 Vol. 36; Iss. 1-2

Thermal cycling response of layered gold/polysilicon MEMS structures

Ken Gall, Martin L. Dunn, Yanhang Zhang, Brian A. Corff
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Volume:
36
Year:
2004
Language:
english
Pages:
11
DOI:
10.1016/s0167-6636(03)00030-9
File:
PDF, 509 KB
english, 2004
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