High-pressure nanolithography using low-energy electrons...

High-pressure nanolithography using low-energy electrons from a scanning tunnelling microscope

Weeks, Brandon L, Vollmer, Antje, Welland, Mark E, Rayment, Trevor
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Volume:
13
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/13/1/308
Date:
February, 2002
File:
PDF, 131 KB
english, 2002
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