CMOS micromachined capacitive cantilevers for mass sensing

Journal of Micromechanics and Microengineering 2006 / 12 Vol. 16; Iss. 12

CMOS micromachined capacitive cantilevers for mass sensing

Li, Ying-Chung, Ho, Meng-Han, Hung, Shi-Jie, Chen, Meng-Huei, Lu, Michael S-C
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Volume:
16
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/16/12/019
Date:
December, 2006
File:
PDF, 484 KB
english, 2006
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