Impact of Crystallization Method on Poly-Si Tunnel FETs

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IEEE Electron Device Letters 2015

Impact of Crystallization Method on Poly-Si Tunnel FETs

Chen, Yi-Hsuan, Ma, William Cheng-Yu, Lin, Jer-Yi, Lin, Chun-Yen, Hsu, Po-Yang, Huang, Chi-Yuan, Chao, Tien-Sheng
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Year:
2015
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2015.2468060
File:
PDF, 287 KB
english, 2015
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