![](/img/cover-not-exists.png)
Alternative stitching method for massively parallel e-beam lithography
Brandt, Pieter, Tranquillin, Céline, Wieland, Marco, Bayle, Sébastien, Milléquant, Matthieu, Renault, GuillaumeVolume:
14
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.14.3.031203
Date:
July, 2015
File:
PDF, 871 KB
english, 2015