Optical frequency comb profilometry with a compressive sensing–based single-pixel camera composed of digital micromirror devices and a two-frequency method for meter-order depth measurements
Pham, Quang Duc, Hayasaki, YoshioVolume:
14
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.14.4.041305
Date:
August, 2015
File:
PDF, 768 KB
english, 2015