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Multiple SOI Structure Fabricate by High Dose Oxygen Implantation and Epitaxial Growth
Irita, Yukio, Kunii, Yasuo, Takahashi, Mitsutoshi, Kajiyama, KenjiVolume:
20
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.20.l909
Date:
December, 1981
File:
PDF, 546 KB
english, 1981