Pulse Laser Annealing Effects in Si-Implanted GaAs

Japanese Journal of Applied Physics 1984 / 3 Vol. 23; Iss. Part 1, No

Pulse Laser Annealing Effects in Si-Implanted GaAs

Oraby, Ahmed H., Yuba, Yoshihiko, Takai, Mikio, Gamo, Kenji, Namba, Susumu
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Volume:
23
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.23.326
Date:
March, 1984
File:
PDF, 617 KB
1984
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