Microdefects Formed in Carbon-Doped CZ Silicon Crystals by...

Japanese Journal of Applied Physics 1985 / 5 Vol. 24; Iss. Part 1, No

Microdefects Formed in Carbon-Doped CZ Silicon Crystals by Oxygen Precipitation Heat Treatment

Kanamori, Masaru, Tsuya, Hideki
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Volume:
24
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.24.557
Date:
May, 1985
File:
PDF, 286 KB
english, 1985
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