Lateral Seeding of Silicon-On-Insulator by Using an...

Japanese Journal of Applied Physics 1987 / 7 Vol. 26; Iss. Part 1, No

Lateral Seeding of Silicon-On-Insulator by Using an Elliptically-Shaped Laser Beam

Fujii, Eiji, Senda, Kohji, Hiroshima, Yoshimitsu, Takamura, Tohru
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Volume:
26
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.26.1190
Date:
July, 1987
File:
PDF, 136 KB
english, 1987
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