Nature of Lattice Defects Induced by Excimer Laser...

Japanese Journal of Applied Physics 1988 / 2 Vol. 27; Iss. Part 2, No

Nature of Lattice Defects Induced by Excimer Laser Irradiation for Extrinsic Gettering

Sakai, Akira, Ono, Haruhiko, Ohshita, Yoshio, Matsui, Junji
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Volume:
27
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.27.l155
Date:
February, 1988
File:
PDF, 299 KB
english, 1988
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