Effect of Depositing a-Si Thickness on Characteristics of...

Effect of Depositing a-Si Thickness on Characteristics of Electric Double Probe Exposed to a Silane Plasma

Kudo, Kouichi
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Volume:
28
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.28.295
Date:
February, 1989
File:
PDF, 270 KB
1989
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