High-Aspect-Ratio Alkaline Surface Treatment Method of Dyed...

Japanese Journal of Applied Physics 1989 / 3 Vol. 28; Iss. Part 1, No

High-Aspect-Ratio Alkaline Surface Treatment Method of Dyed Photoresist

Endo, Masayuki, Sasago, Masaru, Matsuoka, Kouji, Nomura, Noboru
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Volume:
28
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.28.549
Date:
March, 1989
File:
PDF, 260 KB
english, 1989
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