Layer-By-Layer Controlled Digital Etching by Means of an...

Japanese Journal of Applied Physics 1990 / 10 Vol. 29; Iss. Part 1, No

Layer-By-Layer Controlled Digital Etching by Means of an Electron-Beam-Excited Plasma System

Meguro, Takashi, Ishii, Masashi, Kodama, Hirokazu, Hamagaki, Manabu, Hara, Tamio, Yamamoto, Yasuhiro, Aoyagi, Yoshinobu
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Volume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.29.2216
Date:
October, 1990
File:
PDF, 781 KB
1990
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