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Characteristics of a Monodisperse PHS-Based Positive Resist (MDPR) in KrF Excimer Laser Lithography
Kawai, Yoshio, Tanaka, Akinobu, Matsuda, TadahitoVolume:
31
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.31.4316
Date:
December, 1992
File:
PDF, 367 KB
english, 1992