Characteristics of a Monodisperse PHS-Based Positive Resist...

Japanese Journal of Applied Physics 1992 / 12 Vol. 31; Iss. Part 1, No

Characteristics of a Monodisperse PHS-Based Positive Resist (MDPR) in KrF Excimer Laser Lithography

Kawai, Yoshio, Tanaka, Akinobu, Matsuda, Tadahito
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
31
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.31.4316
Date:
December, 1992
File:
PDF, 367 KB
english, 1992
Conversion to is in progress
Conversion to is failed