Growth of Native Oxide and Accumulation of Organic Matter...

Japanese Journal of Applied Physics 1993 / 8 Vol. 32; Iss. Part 2, No

Growth of Native Oxide and Accumulation of Organic Matter on Bare Si Wafer in Air

Okada, Chizuko, Kobayashi, Hiroyuki, Takahashi, Isao, Ryuta, Jiro, Shingyouji, Takayuki
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Volume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.32.l1031
Date:
August, 1993
File:
PDF, 467 KB
english, 1993
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