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Highly Reliable Silicon Nitride Thin Films Made by Jet Vapor Deposition
Wang, Xie-wen, Ma, Tso-Ping, Cui, Guang-Ji, Tamagawa, Takashi, Golz, John W., Karechi, Simon, Halpern, Bret H., Schmitt, Jerome J.Volume:
34
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.34.955
Date:
February, 1995
File:
PDF, 100 KB
english, 1995