Measurement of High-Frequency Dielectric Characteristics in...

Japanese Journal of Applied Physics 1995 / 9 Vol. 34; Iss. Part 2, No

Measurement of High-Frequency Dielectric Characteristics in the mm-Wave Band for Dielectric Thin Films on Semiconductor Substrates

Ikuta, Kenji, Umeda, Yohtaro, Ishii, Yasunobu
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Volume:
34
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.34.l1211
Date:
September, 1995
File:
PDF, 198 KB
english, 1995
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