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Preparation of Cu 10 Zr 7 Intermetallic Compound Film and Its Application as a Diffusion Barrier in Cu/Cu 10 Zr 7 /ZrN/Si Contact System
Yoshimoto, Ken-ichi, Yanagisawa, Hideto, Sasaki, KatsutakaVolume:
36
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.36.7302
Date:
December, 1997
File:
PDF, 349 KB
english, 1997