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Analysis of Deposits Evaporated from Boron-Doped Silicon Melt
Maeda, Susumu, Kato, Masaki, Abe, Keisei, Nakanishi, Hideo, Hoshikawa, Keigo, Terashima, KazutakaVolume:
36
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.36.l971
Date:
August, 1997
File:
PDF, 1.46 MB
english, 1997