Applications of a Chemically Adsorbed Monomolecular Layer...

Japanese Journal of Applied Physics 2000 / 12 Vol. 39; Iss. Part 1, No

Applications of a Chemically Adsorbed Monomolecular Layer Having a Fluorocarbon Chain as an Anti-Contamination Film

Ogawa, Kazufumi, Ohtake, Tadashi, Nomura, Takaiki, Soga, Mamoru, Mino, Norihisa
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Volume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.39.6684
Date:
December, 2000
File:
PDF, 444 KB
english, 2000
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