Contrast Evaluation of the SCALPEL GHOST in 100 kV Electron...

Japanese Journal of Applied Physics 2000 / 12 Vol. 39; Iss. Part 1, No

Contrast Evaluation of the SCALPEL GHOST in 100 kV Electron Projection Lithography

Koba, Fumihiro, Yamashita, Hiroshi, Nomura, Eiichi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.39.6869
Date:
December, 2000
File:
PDF, 109 KB
english, 2000
Conversion to is in progress
Conversion to is failed