Effect of Calcination Process on Synthesis of Ceria...

Japanese Journal of Applied Physics 2006 / 6 Vol. 45; Iss. 6A

Effect of Calcination Process on Synthesis of Ceria Particles, and Its Influence on Shallow Trench Isolation Chemical Mechanical Planarization Performance

Kim, Dae-Hyeong, Kang, Hyun-Goo, Kim, Sang-Kyun, Paik, Ungyu, Park, Jea-Gun
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Volume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.45.4893
Date:
June, 2006
File:
PDF, 306 KB
english, 2006
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