Mechanical Properties and Chemical Reactions at the...

Japanese Journal of Applied Physics 2009 / 1 Vol. 48; Iss. 1

Mechanical Properties and Chemical Reactions at the Directly Bonded Si–Si Interface

Toyoda, Eiji, Sakai, Akira, Isogai, Hiromichi, Senda, Takeshi, Izunome, Koji, Nakatsuka, Osamu, Ogawa, Masaki, Zaima, Shigeaki
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Volume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.48.011202
Date:
January, 2009
File:
PDF, 275 KB
english, 2009
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