![](/img/cover-not-exists.png)
[ACM Press the 52nd Annual Design Automation Conference - San Francisco, California (2015.06.07-2015.06.11)] Proceedings of the 52nd Annual Design Automation Conference on - DAC '15 - Layout optimization and template pattern verification for directed self-assembly (DSA)
Xiao, Zigang, Guo, Daifeng, Wong, Martin D. F., Yi, He, Tung, Maryann C., Wong, H.-S. PhilipYear:
2015
Language:
english
DOI:
10.1145/2744769.2747934
File:
PDF, 768 KB
english, 2015