Influence of Site Competition Effects on Dopant Incorporation during Chemical Vapor Deposition of 4H-SiC Epitaxial Layers
Arvinte, Roxana, Zielinski, Marcin, Chassagne, Thierry, Portail, Marc, Michon, Adrien, Kwasnicki, Pawel, Juillaguet, Sandrine, Peyre, HervéVolume:
821-823
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.821-823.149
Date:
June, 2015
File:
PDF, 298 KB
english, 2015