Pattern Transfer of Sub-micrometre-scaled Structures into Solid Copper by Laser Embossing
Ehrhardt, M., Lorenz, P., Lotnyk, A., Romanus, H., Thelander, E., Zimmer, K.Volume:
56
Year:
2014
Language:
english
Journal:
Physics Procedia
DOI:
10.1016/j.phpro.2014.08.114
File:
PDF, 1.27 MB
english, 2014